An ultrashort throw liquid crystal on silicon (LCoS) projector for home cinema, virtual reality, and automobile heads-up display has been designed and fabricated. To achieve the best performance and highest-quality image, this study aimed to design wide-angle projection optics and optimize the illumination for LCoS. Based on the telecentric lens projection system and optimized Koehler illumination, the optical parameters were calculated. The projector’s optical system consisted of a conic aspheric mirror and image optics using either symmetric double Gauss or a large-angle eyepiece to achieve a full projection angle larger than 155 deg. By applying Koehler illumination, image resolution was enhanced and the modulation transfer function of the image in high spatial frequency was increased to form a high-quality illuminated image. The partial coherence analysis verified that the design was capable of 2.5 lps/mm within a 2 m×1.5 m projected image. The throw ratio was less than 0.25 in HD format.
The critical dimension(CD) is main factor to determine the line width of semiconductor equipment fabricating ability for the smallest line width of produced electronic components. Modulation transfer function(MTF) has been popularly used to evaluation the optical system, due to the contrast of each line-pair in dimension analytically, however, while the light source is coherent or near coherent for the small dimension near the optical diffraction limit, the MTF is hard to achieve consistently. The study of ultra-violet partial coherence modulation transfer function is to calculate the 1-D and 2-D the line with anoptical design program, to estimate the MTF near the size of diffraction limit. It provides fabricating parameter for a 1-to-1 TSV lithographic system. By applying partial coherence analysis, the optimized relative numerical aperture (RNA) has found. As the system is built, the optimized performance should be expected.
In the past decade, the display format from (HD，High Definition) through Full HD(1920X1080)，to UHD(4kX2k), mainly guides display industry to two directions: one is liquid crystal display(LCD) from 10 inch to 100 inch and more, and the other is projector. Although LCD has been popularly used in market; however, the investment for production such kind displays cost more money expenditure, and less consideration of environmental pollution and protection. The Projection system may be considered, due to more viewing access, flexible in location, energy saving and environmental protection issues.
The topic is to design and fabricate a short throw factor liquid crystal on silicon (LCoS) projection system for cinema. It provides a projection lens system, including a tele-centric lens fitted for emitted LCoS to collimate light to enlarge the field angle. Then, the optical path is guided by a symmetric lens. Light of LCoS may pass through the lens, hit on and reflect through an aspherical mirror, to form a less distortion image on blank wall or screen for home cinema. The throw ratio is less than 0.33.
The design and fabrication of common optical components lithography Lens has been carried out for a 1 to 1 stepper. The specification of lens is fulfilled the 3-D lithography system as 2 micron in resolution for 1 inch x 2.8 inches system. The lens has been sophistically designed by dual path in a triplet to reduce the number of components. A single aspherical surface has been applied to reduce the aberration to diffraction limit in lens. The well-made shapes of lens have been suggested. Then, the fabrication of lens has been in the process. Finally, the optical axis of tolerance optical mechanical mountings for lens system in assembly has been analyzed, and valuable for assembly and fabrication.