Jiunn-Jye Tsaur
at AIST
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 2 April 2004
Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III
KEYWORDS: Actuators, Mirrors, Ferroelectric materials, Etching, Electrodes, Silicon, Wavelength division multiplexing, Scanning electron microscopy, Micromirrors, Sol-gels

Proceedings Article | 13 November 2002
Proc. SPIE. 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
KEYWORDS: Actuators, Mirrors, Ferroelectric materials, Polarization, Silicon, Scanning electron microscopy, Laser ablation, Silicon films, Sol-gels, Semiconducting wafers

Proceedings Article | 5 April 2001
Proc. SPIE. 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001
KEYWORDS: Microelectromechanical systems, Semiconductors, Capacitors, Electrodes, Nickel, Silicon, Resistance, Capacitance, Finite element methods, Electroplating

Proceedings Article | 25 August 2000
Proc. SPIE. 4174, Micromachining and Microfabrication Process Technology VI
KEYWORDS: Amorphous silicon, Microelectromechanical systems, Etching, Silicon, Manufacturing, Ultrasonics, Aluminum, Wet etching, Anisotropic etching

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top