Dr. Jiuzhou Tang Profile

Dr. Jiuzhou Tang

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Publications (1)

Proceedings Article | 23 March 2020 Presentation + Paper

Prediction of EUV stochastic microbridge probabilities by lithography simulations

Erik Verduijn, Ulrich Welling, Jiuzhou Tang, Hans-Jürgen Stock, Ulrich Klostermann, Wolfgang Demmerle, Peter De Bisschop

Proceedings Volume 11323, 113230K (2020) https://doi.org/10.1117/12.2552236

KEYWORDS: Data modeling, Lithography, Stochastic processes, Calibration, Extreme ultraviolet lithography, Extreme ultraviolet, 3D modeling, Scanning electron microscopy, Photomasks, Nanoimprint lithography

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