Dr. Jo Finders
Senior Imaging Scientist/Fellow at ASML Netherlands BV
SPIE Involvement:
Senior status | Conference Chair | Conference Program Committee | Author | Editor
Publications (106)

PROCEEDINGS ARTICLE | October 18, 2018
Proc. SPIE. 10810, Photomask Technology 2018
KEYWORDS: Metrology, Liquid phase epitaxy, Error analysis, Inspection, Photomasks, Extreme ultraviolet, Cadmium sulfide, Nanoimprint lithography, Critical dimension metrology, Semiconducting wafers

PROCEEDINGS ARTICLE | October 12, 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Polarization, Sensors, Scanners, Lens design, Extreme ultraviolet lithography, High volume manufacturing, Polarization control

SPIE Conference Volume | September 25, 2018

PROCEEDINGS ARTICLE | September 19, 2018
Proc. SPIE. 10775, 34th European Mask and Lithography Conference
KEYWORDS: Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Computational lithography, Semiconducting wafers, Phase shifts

PROCEEDINGS ARTICLE | May 2, 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Diffraction, Reticles, Optical lithography, Lithographic illumination, Printing, Photomasks, Extreme ultraviolet lithography, Nanoimprint lithography, Semiconducting wafers, Fiber optic illuminators

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Modeling, Lithography, Imaging systems, Sensors, Scanners, Manufacturing, Lens design, Photomasks, Extreme ultraviolet lithography, Optical proximity correction

Showing 5 of 106 publications
Conference Committee Involvement (10)
34th European Mask and Lithography Conference
18 June 2018 | Grenoble, France
33rd European Mask and Lithography Conference
26 June 2017 | Dresden, Germany
Optical Microlithography XXX
28 February 2017 | San Jose, California, United States
32nd European Mask and Lithography Conference
21 June 2016 | Dresden, Germany
Optical Microlithography XXIX
23 February 2016 | San Jose, California, United States
Showing 5 of 10 published special sections
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top