Prof. Joan Bausells
Research Professor at Ctr Nacional de Microelectrónica
SPIE Involvement:
Author
Area of Expertise:
MEMS , Nanofabrication , ISFET , NEMS , CMOS sensors , Nanomechanics
Publications (5)

Proceedings Article | 13 June 2017 Presentation + Paper
Proc. SPIE. 10246, Smart Sensors, Actuators, and MEMS VIII
KEYWORDS: Gold, Lithography, Sensors, Electrodes, Silicon, Silver, Heart, Biosensors, Platinum

SPIE Journal Paper | 27 July 2015
JM3 Vol. 14 Issue 03
KEYWORDS: Silicon, Scanning electron microscopy, Wet etching, Ion beams, Ion implantation, Resonators, Etching, Nanolithography, Ions, Nanowires

Proceedings Article | 10 April 2000 Paper
Proc. SPIE. 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS
KEYWORDS: Microelectromechanical systems, Etching, Manufacturing, Finite element methods, Transistors, Semiconducting wafers, Tolerancing, Yield improvement, Electronic design automation, Standards development

Proceedings Article | 23 September 1996 Paper
Proc. SPIE. 2879, Micromachining and Microfabrication Process Technology II
KEYWORDS: Infrared sensors, Sensors, Silicon, Manufacturing, Field effect transistors, CMOS technology, Computer aided design, System integration, Anisotropic etching, Standards development

Proceedings Article | 17 September 1996 Paper
Proc. SPIE. 2882, Micromachined Devices and Components II
KEYWORDS: CMOS sensors, Microsystems, Sensors, Etching, CMOS technology, Computer aided design, Sensor technology, Solid modeling, Standards development, Instrument modeling

Conference Committee Involvement (8)
Smart Sensors, Actuators, and MEMS VIII
8 May 2017 | Barcelona, Spain
Smart Sensors, Actuators, and MEMS VII
4 May 2015 | Barcelona, Spain
Smart Sensors, Actuators, and MEMS VI
24 April 2013 | Grenoble, France
Smart Sensors, Actuators and MEMS
18 April 2011 | Prague, Czech Republic
Smart Sensors, Actuators and MEMS
4 May 2009 | Dresden, Germany
Showing 5 of 8 Conference Committees
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