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Xianzhong X. Zeng
Technologist Process Engineer at Western Digital Corp
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Publications (1)
Proceedings Article | 20 September 2004 Paper
Ultraviolet femtosecond and nanosecond laser ablation of silicon: ablation efficiency and laser-induced plasma expansion
Xianzhong Zeng, Xianglei Mao, Ralph Greif, Richard Russo
Proceedings Volume 5448, (2004) https://doi.org/10.1117/12.544401
KEYWORDS: Laser ablation, Plasma, Femtosecond phenomena, Silicon, Ultraviolet radiation, Pulsed laser operation, Semiconductor lasers, Laser beam diagnostics, Spectroscopy, Temperature metrology
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