Dr. Jörg Mick
Graduate Engineer at temicon GmbH
SPIE Involvement:
Author
Area of Expertise:
interference lithography , nanostructures , optics , microstructures , seamless large area structuring , processes
Websites:
Profile Summary

Expertise in seamless large area micro- and nanostructuring on large areas in photoresists. Additional experience in tooling, e.g. metallic (nickel) tools, PDMS or polyermic molds for replication purposes. Such molds might be used for high volume mass replication processes like UV-roll-to-roll embossing, hot-embossing, injection molding, etc. Besides interference lithography, other tooling technologies like UV-lithography, diamond cutting, e-beam structuring, ... are well known.
Publications (5)

PROCEEDINGS ARTICLE | February 20, 2017
Proc. SPIE. 10115, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics X
KEYWORDS: Lithography, Nanostructures, Nanostructuring, Polymers, Nickel, Diffusion, Control systems, Life sciences, Photoresist materials, Diffusers, Light sources and illumination, Nanolithography, Diffraction gratings

PROCEEDINGS ARTICLE | May 6, 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Optical components, Lithography, Lenses, Polymers, Glasses, Silicon, Photoresist materials, Photomicroscopy, Solar energy systems, Optics manufacturing

SPIE Journal Paper | November 1, 2004
OE Vol. 43 Issue 11
KEYWORDS: Antireflective coatings, Photoresist materials, Optics manufacturing, Lithography, Compound parabolic concentrators, Sun, Refractive index, Diffusers, Solar cells, Polymers

PROCEEDINGS ARTICLE | September 8, 2004
Proc. SPIE. 5454, Micro-Optics: Fabrication, Packaging, and Integration
KEYWORDS: Lithography, Optical properties, Polymers, Ultraviolet radiation, Nickel, Coating, Manufacturing, Photoresist materials, Transmittance, Photoresist developing

PROCEEDINGS ARTICLE | December 29, 2003
Proc. SPIE. 5184, Physics, Theory, and Applications of Periodic Structures in Optics II
KEYWORDS: Lithography, Refractive index, Antireflective coatings, Prisms, Sun, Polymers, Solar cells, Photoresist materials, Diffusers, Compound parabolic concentrators

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