Dr. Joerg Stuermann
at Univ Bremen
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | January 15, 2003
Proc. SPIE. 4979, Micromachining and Microfabrication Process Technology VIII
KEYWORDS: Gas sensors, Etching, Silicon, Gases, Platinum, Palladium, Wet etching, Chemical elements, Carbon monoxide, Anisotropic etching

PROCEEDINGS ARTICLE | August 25, 2000
Proc. SPIE. 4174, Micromachining and Microfabrication Process Technology VI
KEYWORDS: Etching, Metals, Silicon, Bioalcohols, Chemical elements, Semiconducting wafers, HF etching

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