Dr. Joern-Holger Franke
at imec
SPIE Involvement:
Author
Publications (33)

Proceedings Article | 10 April 2024 Presentation
Paulina Rincon-Delgadillo, Sara Paolillo, Joern-Holger Franke, Gijsbert Rispens
Proceedings Volume PC12953, PC129530E (2024) https://doi.org/10.1117/12.3010914
KEYWORDS: Etching, Metrology, Printing, Stochastic processes, Extreme ultraviolet

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12953, 129530O (2024) https://doi.org/10.1117/12.3010846
KEYWORDS: 3D mask effects, Light sources and illumination, SRAF, Diffraction, Semiconducting wafers, Printing, Extreme ultraviolet lithography, Critical dimension metrology, 3D modeling

Proceedings Article | 21 November 2023 Presentation + Paper
Proceedings Volume 12750, 1275006 (2023) https://doi.org/10.1117/12.2685543
KEYWORDS: Semiconducting wafers, Stochastic processes, Nanoimprint lithography, Printing, Line width roughness, Simulations, Optical lithography, Extreme ultraviolet lithography, Scanning electron microscopy, Extreme ultraviolet

Proceedings Article | 21 November 2023 Presentation + Paper
Proceedings Volume 12750, 1275005 (2023) https://doi.org/10.1117/12.2687549
KEYWORDS: Printing, 3D mask effects, Extreme ultraviolet, Simulations, Reticles, Photomask technology, Optical lithography, Metals, Lithography, Extreme ultraviolet lithography

Proceedings Article | 21 November 2023 Presentation + Paper
Proceedings Volume 12750, 127500P (2023) https://doi.org/10.1117/12.2687558
KEYWORDS: Process control, Critical dimension metrology, Back end of line, Optical lithography, Extreme ultraviolet lithography, Metals, Thermal stability, Temperature control, Semiconductors, Semiconducting wafers

Showing 5 of 33 publications
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