Johan K. van Seggelen
at Technische Univ Eindhoven
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 18 August 2005
Proc. SPIE. 5879, Recent Developments in Traceable Dimensional Measurements III
KEYWORDS: Calibration, Actuators, Optical spheres, Head, Ruby, Optical alignment, Servomechanisms, Interferometers, Metrology, 3D metrology

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