Dr. Johann Zehetner
at FH Vorarlberg
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 21 May 2015
Proc. SPIE. 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
KEYWORDS: Microelectromechanical systems, Thin films, Polarization, Sensors, Glasses, Ceramics, Laser ablation, Sapphire, Silicon carbide, Reactive ion etching

Proceedings Article | 7 May 2015
Proc. SPIE. 9507, Micro-structured and Specialty Optical Fibres IV
KEYWORDS: Gold, Thin films, Optical filters, Photonic crystal fibers, Waveguides, Polarization, Metals, Laser ablation, Free space optics, Filtering (signal processing)

Proceedings Article | 17 May 2013
Proc. SPIE. 8763, Smart Sensors, Actuators, and MEMS VI
KEYWORDS: Microelectromechanical systems, Sensors, Etching, Silicon, Laser ablation, Gallium nitride, Field effect transistors, Silicon carbide, Heterojunctions, Bulk micromachining

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