Johannes Dickmann
at Physikalisch-Technische Bundesanstalt
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 21 June 2019
Proc. SPIE. 11057, Modeling Aspects in Optical Metrology VII
KEYWORDS: Ellipsometry, Plasmonics, Nanostructures, Metrology, Numerical simulations, Scanning electron microscopy, Near field optics

Proceedings Article | 21 June 2019
Proc. SPIE. 11057, Modeling Aspects in Optical Metrology VII
KEYWORDS: Refractive index, Modulation, Refraction, Precision measurement, Photothermal effect, Spatial resolution, Absorption

Proceedings Article | 24 May 2018
Proc. SPIE. 10678, Optical Micro- and Nanometrology VII
KEYWORDS: Visible radiation, Deep ultraviolet, Polarization, Etching, Spectroscopy, Chromium, Polarizers, Ion beams, Transmittance, Double patterning technology

Proceedings Article | 26 June 2017
Proc. SPIE. 10330, Modeling Aspects in Optical Metrology VI
KEYWORDS: Modeling, Refractive index, Finite-difference time-domain method, Deep ultraviolet, Polarization, Etching, Tungsten, Polarizers, Optical metrology, Ion beams, Line edge roughness, Polarization control

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