Dr. Johannes Nieder
Key Account Manager at SCHOTT AG
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 15, 2016
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Lithography, Metrology, Optical lithography, Birefringence, Calibration, Glasses, Ceramics, Head, Zerodur, Overlay metrology, Temperature metrology

PROCEEDINGS ARTICLE | March 31, 2014
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Lithography, Mirrors, Metrology, Optical lithography, Glasses, Ceramics, Manufacturing, Semiconducting wafers, Tolerancing, Zerodur

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