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John W. Berrett
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Publications (1)
Proceedings Article | 6 July 2006 Paper
Rapid damage-free shaping of silicon carbide using reactive atom plasma (RAP) processing
Yogesh Verma, Andrew Chang, John Berrett, Kenneth Futtere, George Gardopee, Jude Kelley, Thomas Kyler, Jeonghwa Lee, Nick Lyford, David Proscia, Phillip Sommer
Proceedings Volume 6273, 62730B (2006) https://doi.org/10.1117/12.671969
KEYWORDS: Silicon carbide, Glasses, Optics manufacturing, Argon, Abrasives, Plasma, Fluorine, Chemical species, Surface finishing, Polishing
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