Dr. John H. Bruning
Retired
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 27 March 2007
Proc. SPIE. 6520, Optical Microlithography XX
KEYWORDS: Lithography, Mirrors, Reticles, Optical lithography, Imaging systems, Cameras, Lens design, Printing, Photomasks, Semiconducting wafers

Proceedings Article | 4 November 2003
Proc. SPIE. 5188, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies
KEYWORDS: Refractive index, Polishing, Contamination, Crystals, Surface roughness, Atomic force microscopy, Excimer lasers, Radium, Crystal optics, Surface finishing

SPIE Journal Paper | 1 October 2002
JM3 Vol. 1 Issue 03
KEYWORDS: Birefringence, Crystals, Anisotropy, Polarization, Dielectrics, Wave propagation, Lithography, Ultraviolet radiation, UV optics, Refraction

Proceedings Article | 7 July 1997
Proc. SPIE. 3048, Emerging Lithographic Technologies
KEYWORDS: Lithography, Mirrors, Optical design, Optical lithography, Imaging systems, Lenses, Lens design, Printing, Photomasks, Semiconducting wafers

Proceedings Article | 7 July 1997
Proc. SPIE. 3050, Metrology, Inspection, and Process Control for Microlithography XI
KEYWORDS: Lithography, Mirrors, Optical design, Optical lithography, Imaging systems, Lenses, Lens design, Printing, Photomasks, Semiconducting wafers

Showing 5 of 8 publications
Conference Committee Involvement (1)
Optical Sciences
10 April 2001 | Rochester, NY, United States
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