Dr. John H. Burnett
Physicist at NIST
SPIE Involvement:
Author
Publications (15)

PROCEEDINGS ARTICLE | September 20, 2016
Proc. SPIE. 9974, Infrared Sensors, Devices, and Applications VI
KEYWORDS: Refractive index, Mirrors, Optical design, Prisms, Calibration, Germanium, Refraction, Monochromators, Refractometry, Temperature metrology

SPIE Journal Paper | April 1, 2009
JM3 Vol. 8 Issue 02
KEYWORDS: Refraction, Water, Refractive index, Prisms, Thermal optics, Lithography, Microfluidics, Absorbance, Temperature metrology, Immersion lithography

PROCEEDINGS ARTICLE | March 16, 2009
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Lithography, Lithographic illumination, Polarization, Birefringence, Crystals, Sapphire, Double patterning technology, Immersion lithography, Absorption, Anisotropy

PROCEEDINGS ARTICLE | March 27, 2007
Proc. SPIE. 6520, Optical Microlithography XX
KEYWORDS: Refractive index, Prisms, Optical lithography, Birefringence, Interfaces, Photoresist materials, Sapphire, Aluminum, Absorbance, Lutetium

PROCEEDINGS ARTICLE | March 15, 2006
Proc. SPIE. 6154, Optical Microlithography XIX
KEYWORDS: Oxides, Magnesium, Optical properties, Crystals, Germanium, Ceramics, Aluminum, Lutetium, Garnet, Spinel

PROCEEDINGS ARTICLE | May 28, 2004
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Refractive index, Prisms, Thermal optics, Water, Nitrogen, Refraction, Immersion lithography, Vacuum ultraviolet, Environmental sensing, Liquids

Showing 5 of 15 publications
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