Prof. John T. Fourkas
Millard Alexander Professor of Chemistry at Univ of Maryland College Park
SPIE Involvement:
Conference Program Committee | Author
Publications (15)

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Lithography, Diffraction, Beam splitters, Optical parametric oscillators, Polymers, In situ metrology, Molecules, Photoresist materials, Polymerization, Laser beam diagnostics

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Thin films, Lithography, Visible radiation, Optical lithography, Etching, Silicon, Resistance, Photoresist materials, Semiconducting wafers, Plasma

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Lithography, Visible radiation, Continuous wave operation, Super resolution, Molecules, Chemistry, Photoresist materials, Polymerization, Multiphoton lithography

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Thin films, Lithography, Point spread functions, Optical lithography, Etching, Microscopy, Molecules, Photoresist materials, Stimulated emission depletion microscopy, Absorption

PROCEEDINGS ARTICLE | February 23, 2018
Proc. SPIE. 10534, 2D Photonic Materials and Devices
KEYWORDS: Semiconductors, Plasmonics, Surface plasmons, Surface plasmon polaritons, Continuous wave operation, Polarization, Silver, Excitons, Nanowires

PROCEEDINGS ARTICLE | March 18, 2015
Proc. SPIE. 9426, Optical Microlithography XXVIII
KEYWORDS: Semiconductors, Lithography, Diffraction, Visible radiation, Optical lithography, Molecules, Chemistry, Photoresist materials, Nanolithography, Absorption

Showing 5 of 15 publications
Conference Committee Involvement (7)
Advanced Manufacturing Technologies for Micro- and Nanosystems in Security and Defence
9 September 2019 | Strasbourg, France
Laser 3D Manufacturing VI
5 February 2019 | San Francisco, California, United States
Advanced Manufacturing Technologies for Micro- and Nanosystems in Security and Defence
10 September 2018 | Berlin, Germany
Laser 3D Manufacturing V
29 January 2018 | San Francisco, California, United States
Laser 3D Manufacturing IV
30 January 2017 | San Francisco, California, United States
Showing 5 of 7 published special sections
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