John Kincade
Director at Zygo Corporation
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 18 March 2016
Proc. SPIE. 9776, Extreme Ultraviolet (EUV) Lithography VII
KEYWORDS: Lithography, Mirrors, Optical design, Reticles, Optical lithography, Polarization, Process control, Projection systems, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers

Proceedings Article | 5 August 2010
Proc. SPIE. 7731, Space Telescopes and Instrumentation 2010: Optical, Infrared, and Millimeter Wave
KEYWORDS: Mirrors, Polishing, Metrology, Aerospace engineering, Phase modulation, Optical fabrication, Optical testing, Beryllium, James Webb Space Telescope, Surface finishing

Proceedings Article | 7 July 2006
Proc. SPIE. 6265, Space Telescopes and Instrumentation I: Optical, Infrared, and Millimeter
KEYWORDS: Telescopes, Mirrors, Metrology, Sensors, Wavefront sensors, Wavefronts, Optical fabrication, Infrared radiation, James Webb Space Telescope, Surface finishing

Proceedings Article | 10 June 2006
Proc. SPIE. 6265, Space Telescopes and Instrumentation I: Optical, Infrared, and Millimeter
KEYWORDS: Mirrors, Polishing, Metrology, Safety, Space telescopes, Infrared telescopes, Beryllium, James Webb Space Telescope, Cryogenics, Surface finishing

Proceedings Article | 1 November 1996
Proc. SPIE. 2863, Current Developments in Optical Design and Engineering VI
KEYWORDS: Gold, Thermography, Mirrors, Polishing, Radio optics, Aerospace engineering, Coating, Reflectivity, Infrared radiation, Radiometry

Showing 5 of 6 publications
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