John C. Lam
Senior Member of the Technical Staff at n&k Technology Inc
SPIE Involvement:
Publications (11)

Proceedings Article | 17 October 2008 Paper
Jan Richter, Jens Rudolf, Bernd Bodermann, John Lam
Proceedings Volume 7122, 71222U (2008)
KEYWORDS: Critical dimension metrology, Photomasks, Scatterometry, Scanning electron microscopy, Metrology, Phase shifts, Etching, Quartz, Diffraction, Phase measurement

Proceedings Article | 2 May 2008 Paper
John Lam, Alexander Gray, Stanley Chen, Jan Richter
Proceedings Volume 6792, 679212 (2008)
KEYWORDS: Reflectivity, Scatterometry, Transmittance, Photomasks, Spectrophotometry, Metrology, Nondestructive evaluation, Lamps, Visible radiation, Light

Proceedings Article | 1 November 2007 Paper
Jan Richter, Phillipp Laube, John Lam
Proceedings Volume 6730, 67304R (2007)
KEYWORDS: Critical dimension metrology, Scatterometry, Scatter measurement, Metrology, Photomasks, Feedback loops, Data corrections, Data modeling, Systems modeling, Numerical analysis

Proceedings Article | 30 October 2007 Paper
Alexander Gray, John Lam, Stanley Chen, Jan Richter
Proceedings Volume 6730, 67303C (2007)
KEYWORDS: Transmittance, Reflectivity, Critical dimension metrology, Optical properties, Diffraction, Matrices, Scatterometry, Signal to noise ratio, Inspection, Photomasks

Proceedings Article | 14 May 2007 Paper
Proceedings Volume 6607, 660710 (2007)
KEYWORDS: Transmittance, Reflectivity, Scatterometry, Scatter measurement, Critical dimension metrology, Dispersion, Signal to noise ratio, Optical testing, Quartz, Photons

Showing 5 of 11 publications
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