John G. Maltabes
Imprint Engineering at Applied Materials
SPIE Involvement:
Conference Program Committee | Author
Area of Expertise:
Imprint Lithography , Defect reduction , Litho Strategy , DUV/EUV lithography , Yield learning
Publications (29)

PROCEEDINGS ARTICLE | March 21, 2012
Proc. SPIE. 8323, Alternative Lithographic Technologies IV
KEYWORDS: Thin films, Lithography, Etching, Ultraviolet radiation, Dielectrics, Coating, Inspection, Scanning electron microscopy, Plasma enhanced chemical vapor deposition, Flexible displays

PROCEEDINGS ARTICLE | April 3, 2010
Proc. SPIE. 7637, Alternative Lithographic Technologies II
KEYWORDS: Lithography, Atrial fibrillation, Etching, Quartz, Polymers, Silicon, Coating, Photomasks, Transistors, Semiconducting wafers

PROCEEDINGS ARTICLE | May 19, 2008
Proc. SPIE. 7028, Photomask and Next-Generation Lithography Mask Technology XV
KEYWORDS: Lithography, Etching, Manufacturing, Photomasks, Line width roughness, Beam shaping, Critical dimension metrology, Line edge roughness, Semiconducting wafers, Overlay metrology

PROCEEDINGS ARTICLE | March 21, 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Lithography, Optical lithography, Etching, Image processing, Particles, Manufacturing, Inspection, Photomasks, Semiconducting wafers, Defect inspection

PROCEEDINGS ARTICLE | November 16, 2007
Proc. SPIE. 6730, Photomask Technology 2007
KEYWORDS: Lithography, Contamination, Image processing, Ultraviolet radiation, Particles, Ions, Inspection, Wafer inspection, Semiconducting wafers, Defect inspection

PROCEEDINGS ARTICLE | March 21, 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Lithography, Optical lithography, Defect detection, Silica, Ultraviolet radiation, Particles, Manufacturing, Inspection, Photomasks, Semiconducting wafers

Showing 5 of 29 publications
Conference Committee Involvement (9)
Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2019
25 February 2019 | San Jose, California, United States
Novel Patterning Technologies 2018
26 February 2018 | San Jose, California, United States
Novel Patterning Technologies 2018
18 February 2018 |
Emerging Patterning Technologies 2017
27 February 2017 | San Jose, California, United States
Alternative Lithographic Technologies VIII
22 February 2016 | San Jose, California, United States
Showing 5 of 9 published special sections
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