Dr. John A. Marsella Profile

Dr. John A. Marsella

Senior Research Associate at Air Products and Chemicals Inc

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 14 May 2004 Paper

John Marsella, Atteye Abdourazak, Richard Carr, Thomas Markley, Eric Robertson

Proceedings Volume 5376, (2004) https://doi.org/10.1117/12.535613

KEYWORDS: Photoresist materials, Polymers, Absorption, Transparency, Lithography, Absorbance, Industrial chemicals, Chemistry, Etching, Resistance

Proceedings Article | 14 May 2004 Paper

Vladimir Jakubek, Eric Robertson, Atteye Abdourazak, Thomas Markley, John Marsella, Christopher Ober

Proceedings Volume 5376, (2004) https://doi.org/10.1117/12.536586

KEYWORDS: Fluorine, Polymers, Transparency, Etching, Resistance, Lithography, Absorption, Chemical species, Chemically amplified resists, Silicon

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