Dr. John A. Marsella
Senior Research Associate at Air Products and Chemicals Inc
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | May 14, 2004
Proc. SPIE. 5376, Advances in Resist Technology and Processing XXI
KEYWORDS: Lithography, Transparency, Etching, Chemical species, Polymers, Silicon, Resistance, Fluorine, Absorption, Chemically amplified resists

PROCEEDINGS ARTICLE | May 14, 2004
Proc. SPIE. 5376, Advances in Resist Technology and Processing XXI
KEYWORDS: Lithography, Transparency, Etching, Polymers, Chemistry, Resistance, Photoresist materials, Absorbance, Industrial chemicals, Absorption

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