John C. Moore
Technical Director at DAETEC LLC
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 20, 2015
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Etching, Metals, Copper, Chemistry, Scanning electron microscopy, Printing, Photoresist materials, Plating, Semiconducting wafers, Liquids

PROCEEDINGS ARTICLE | April 5, 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Semiconductors, Statistical analysis, Foam, Diffractive optical elements, Water, Particles, Chemistry, Semiconducting wafers, Surface finishing, Liquids

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