John J. Steele
at Univ of Alberta
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 9 January 2008
Proc. SPIE. 6800, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
KEYWORDS: Fabrication, Thin films, Refractive index, Sensors, Water, Nitrogen, Optical coatings, Refraction, Humidity, Adsorption

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