Dr. John C. Stover
Owner/Manager at Scatter Works Inc
SPIE Involvement:
Fellow status | Conference Program Committee | Conference Chair | Track Chair | Author | Editor | Instructor
Publications (74)

PROCEEDINGS ARTICLE | October 5, 2016
Proc. SPIE. 9961, Reflection, Scattering, and Diffraction from Surfaces V
KEYWORDS: Gold, Diffraction, Metrology, Spatial frequencies, Scattering, Light scattering, Bidirectional reflectance transmission function, Geometrical optics, Scatter measurement, Diffraction gratings

PROCEEDINGS ARTICLE | July 29, 2016
Proc. SPIE. 9904, Space Telescopes and Instrumentation 2016: Optical, Infrared, and Millimeter Wave
KEYWORDS: Telescopes, Titanium, Light scattering, Light scattering, Coating, Exoplanets, Space telescopes, Planets, Scatter measurement, Statistical modeling, Solid modeling

PROCEEDINGS ARTICLE | September 28, 2015
Proc. SPIE. 9629, Optical Systems Design 2015: Illumination Optics IV
KEYWORDS: Hyperspectral imaging, Short wave infrared radiation, Polarization, Imaging systems, Inspection, Lens design, Bidirectional reflectance transmission function, Domes, Tolerancing, Light

PROCEEDINGS ARTICLE | September 24, 2015
Proc. SPIE. 9628, Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V
KEYWORDS: Telescopes, Mirrors, Diamond, Statistical analysis, Stars, Particles, Optical testing, Space telescopes, Bidirectional reflectance transmission function, Scatter measurement

PROCEEDINGS ARTICLE | August 27, 2015
Proc. SPIE. 9575, Optical Manufacturing and Testing XI
KEYWORDS: Telescopes, Gaussian beams, Stars, Scattering, Particles, Optical testing, Space telescopes, Bidirectional reflectance transmission function, Scatter measurement, Edge roughness

PROCEEDINGS ARTICLE | November 13, 2014
Proc. SPIE. 9276, Optical Metrology and Inspection for Industrial Applications III
KEYWORDS: Polarization, Spatial frequencies, Scattering, Light scattering, Surface roughness, Bidirectional reflectance transmission function, Profilometers, Picosecond phenomena, Geometrical optics, Scatter measurement

Showing 5 of 74 publications
Conference Committee Involvement (14)
Optical Metrology and Inspection for Industrial Applications V
11 October 2018 | Beijing, China
Optical Metrology and Inspection for Industrial Applications IV
12 October 2016 | Beijing, China
Optical Metrology and Inspection for Industrial Applications III
9 October 2014 | Beijing, China
Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III
28 August 2007 | San Diego, California, United States
Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II
2 August 2005 | San Diego, California, United States
Showing 5 of 14 published special sections
Course Instructor
SC1003: Optical Scatter Metrology for Industry
The course emphasizes quantifying, measuring and understanding scatter. A scatterometer will be used during the class to illustrate these issues and students are encouraged to bring samples to the course. Optical scatter, originally used almost exclusively to characterize the stray light generated by optically smooth surfaces, is now being used as a fast, economical way to monitor the surface texture requirements in a variety of industries. For example, as the lighting industry moves to LED’s scatter from a huge number of components is being measured for analysis in stray radiation codes. Texture is an important requirement for the metal producing industry and it changes with roll wear. The appearance of every day appliances (from door hinges to computer cases) varies dramatically with texture. The quality of flat panel displays depends on the scatter characteristics of the screen and components behind it. SEMI and ASTM have responded to the new applications with "scatter standards" to help communication between manufacturers, vendors and customers. The course starts with easier to analyze optical applications and then explores the transition to rougher industry surfaces, where the measurements are easier. Between a good optical mirror and a concrete sidewalk there are thousands of industry surfaces that can be monitored with scatter metrology. There are two key points for these "in-between" surfaces: (1) If the texture changes - the scatter changes and (2) these changes (and product function) cannot be adequately monitored by a single variable - such as RMS Roughness, Haze or Gloss. Students are asked to share as much as they can of their scatter metrology issues.
SC020: Optical Scattering: Measurement and Analysis
Optical scatter can be used as a sensitive indicator of surface and bulk defects in many processes. In its various quantitative forms (BRDF, TIS, DSC), it has been used to calculate and map component parameters such as surface texture statistics, particle size, stray radiation and surface appearance. Originally used almost exclusively in the optics industry, it is now finding use as a source of fast, non-contact metrology in a variety of industries where defect-free surfaces are important (defense optics, semiconductors, computer disks, flat panel displays, and surface appearance). The use of scattering standards in the semiconductor industry has become much more important over the last ten years and SEMI has introduced a suite of written standards that are useful across many industries. The course emphasizes quantifying, understanding and measuring scatter. Modeling scatter is emphasized in SC492 taught by Thomas Germer.
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