Dr. John S. Taylor
Precision Systems & Manufacturing Group Leader at Lawrence Livermore National Lab
SPIE Involvement:
Fellow status | Conference Program Committee | Conference Chair | Author
Publications (27)

PROCEEDINGS ARTICLE | October 20, 2006
Proc. SPIE. 6349, Photomask Technology 2006
KEYWORDS: Multilayers, Defect detection, Imaging systems, Coating, Inspection, Reflectivity, Printing, Photomasks, Extreme ultraviolet, Signal detection

SPIE Journal Paper | April 1, 2006
JM3 Vol. 5 Issue 02
KEYWORDS: Ruthenium, Silicon, Molybdenum, Extreme ultraviolet lithography, Reflectivity, Electrons, Oxides, Resistance, Transmission electron microscopy, Oxidation

PROCEEDINGS ARTICLE | March 22, 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Monochromatic aberrations, Visible radiation, Polarization, Interferometers, Calibration, Wavefronts, Optical testing, Zernike polynomials, Extreme ultraviolet lithography, Near field optics

PROCEEDINGS ARTICLE | September 8, 2005
Proc. SPIE. 5900, Optics for EUV, X-Ray, and Gamma-Ray Astronomy II
KEYWORDS: Light sources, X-ray optics, Lenses, X-rays, Interferometry, Optical testing, Extreme ultraviolet, Astronomical imaging, X-ray astronomy, EUV optics

SPIE Conference Volume | August 31, 2005

PROCEEDINGS ARTICLE | August 18, 2005
Proc. SPIE. 5869, Optical Manufacturing and Testing VI
KEYWORDS: Monochromatic aberrations, Mirrors, Metrology, Polarization, Cameras, Calibration, Silicon, Wavefronts, Charge-coupled devices, Extreme ultraviolet lithography

Showing 5 of 27 publications
Conference Committee Involvement (6)
Advances in X-Ray/EUV Optics and Components II
27 August 2007 | San Diego, California, United States
Advances in X-Ray/EUV Optics, Components, and Applications
14 August 2006 | San Diego, California, United States
Advances in Metrology for X-Ray and EUV Optics
2 August 2005 | San Diego, California, United States
Optical Manufacturing and Testing VI
31 July 2005 | San Diego, California, United States
Optical Manufacturing and Testing V
3 August 2003 | San Diego, California, United States
Showing 5 of 6 published special sections
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