Mr. John M. Tingay Profile

John M. Tingay

R&D Manager at Vistec Lithography Ltd

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Publications (2)

Proceedings Article | 15 March 2007 Paper

Stage position measurement for e-beam lithography tool

Paul Harris, William Lee, Andrew McClelland, John Tingay

Proceedings Volume 6517, 651710 (2007) https://doi.org/10.1117/12.711452

KEYWORDS: Interferometers, Electron beam lithography, Interferometry, Sensors, Head, Mirrors, Interfaces, Lithography, Optical testing, Electron beams

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Proceedings Article | 11 December 1998 Paper

Commercial developments in synchrotron optical components: a novel coolant for high-heat-load optics

Paul Loeffen, John Tingay, Timothy Gill, Joachim Paul, Phillip Pattison

Proceedings Volume 3448, (1998) https://doi.org/10.1117/12.332495

KEYWORDS: Crystals, Monochromators, Mirrors, Laser crystals, Silicon, Synchrotrons, Diamond, X-rays, Optical components, Thermal effects

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