Dr. John F. Valley
Staff Program Manager at Onto Innovation Inc
SPIE Involvement:
Author
Publications (14)

Proceedings Article | 26 September 2016 Presentation + Paper
Proc. SPIE. 9927, Nanoengineering: Fabrication, Properties, Optics, and Devices XIII
KEYWORDS: Metrology, Silicon, Manufacturing, Inspection, Reflectivity, Semiconductor lasers, Data acquisition, Laser scanners, Wafer inspection, Semiconducting wafers

Proceedings Article | 9 March 2016 Paper
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Lithography, Polishing, Metrology, Digital signal processing, Spatial frequencies, Image processing, Manufacturing, Linear filtering, Data processing, Process control, Convolution, High volume manufacturing, Semiconducting wafers, Surface finishing, Overlay metrology, Chemical mechanical planarization, Front end of line

Proceedings Article | 27 August 2014 Paper
Proc. SPIE. 9173, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII
KEYWORDS: Packaging, Polishing, Metrology, Image processing, Crystals, Silicon, Inspection, Image analysis, Image quality, Semiconducting wafers

Proceedings Article | 24 May 2004 Paper
Proc. SPIE. 5375, Metrology, Inspection, and Process Control for Microlithography XVIII
KEYWORDS: Lithography, Reticles, Metrology, Silicon, Inspection, Nomenclature, Data acquisition, Optical alignment, Critical dimension metrology, Semiconducting wafers

Proceedings Article | 16 July 2002 Paper
Proc. SPIE. 4689, Metrology, Inspection, and Process Control for Microlithography XVI
KEYWORDS: Lithography, Photovoltaics, Polishing, Metrology, Statistical analysis, Interferometers, Manufacturing, Interferometry, Semiconducting wafers, Chemical mechanical planarization

Showing 5 of 14 publications
Conference Committee Involvement (4)
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V
24 August 2011 | San Diego, California, United States
Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III
28 August 2007 | San Diego, California, United States
Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II
2 August 2005 | San Diego, California, United States
Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies
3 August 2003 | San Diego, California, United States
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top