Dr. John S. Villarrubia
Physicist at National Institute of Standards and Technology
SPIE Involvement:
Senior status | Conference Program Committee | Symposium Committee | Author
Publications (36)

PROCEEDINGS ARTICLE | March 24, 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Metrology, Scattering, Skin, Error analysis, Electron microscopes, Clouds, 3D modeling, Scanning electron microscopy, Photogrammetry, Data processing, 3D metrology, 3D scanning, Critical dimension metrology, Virtual reality, 3D image processing

SPIE Journal Paper | November 12, 2015
JM3 Vol. 14 Issue 04
KEYWORDS: Scanning electron microscopy, Metrology, Error analysis, Data modeling, Standards development, 3D metrology, Monte Carlo methods, Indium arsenide, Electron microscopes, Calibration

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Metrology, Indium arsenide, Data modeling, Calibration, Error analysis, Scanning electron microscopy, Monte Carlo methods, Inverse problems, 3D metrology, Standards development

PROCEEDINGS ARTICLE | September 16, 2014
Proc. SPIE. 9236, Scanning Microscopies 2014
KEYWORDS: Metrology, Scattering, Sensors, Electrons, 3D modeling, Scanning electron microscopy, Monte Carlo methods, Photomasks, Statistical modeling, Model-based design

PROCEEDINGS ARTICLE | April 14, 2014
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Metrology, Data modeling, Error analysis, 3D modeling, Atomic force microscopy, Scanning electron microscopy, Uncertainty analysis, 3D metrology, Critical dimension metrology, Model-based design

PROCEEDINGS ARTICLE | April 14, 2014
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Electron beams, Metrology, 3D modeling, Scanning electron microscopy, Transmission electron microscopy, Monte Carlo methods, 3D metrology, Process control, Model-based design, 3D image processing

Showing 5 of 36 publications
Conference Committee Involvement (7)
Scanning Microscopies 2015
29 September 2015 | Monterey, California, United States
Scanning Microscopies 2014
16 September 2014 | Monterey, California, United States
Scanning Microscopies 2013: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences
30 April 2013 | Baltimore, Maryland, United States
Scanning Microscopies 2012: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences
24 April 2012 | Baltimore, Maryland, United States
Scanning Microscopies 2011: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences
26 April 2011 | Orlando, Florida, United States
Showing 5 of 7 published special sections
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