Dr. John B. Warren
Staff Scientist at Brookhaven National Lab
SPIE Involvement:
Author
Publications (1)

SPIE Journal Paper | October 1, 2009
JNP Vol. 3 Issue 01
KEYWORDS: Silicon, Nickel, X-rays, Nanoparticles, Particles, Electron beam lithography, Scanning electron microscopy, Metals, Semiconducting wafers, Metrology

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