Prof. John A. Woollam
President at JA Woollam
SPIE Involvement:
Author
Publications (20)

Proceedings Article | 23 July 2003 Paper
Proc. SPIE. 4965, Optical Diagnostics and Sensing in Biomedicine III
KEYWORDS: Ellipsometry, Visible radiation, Reflection, Molecules, Silicon, Optical testing, Spectroscopic ellipsometry, Infrared radiation, Chemical analysis, Absorption

Proceedings Article | 30 May 2003 Paper
Proc. SPIE. 4932, Laser-Induced Damage in Optical Materials: 2002 and 7th International Workshop on Laser Beam and Optics Characterization
KEYWORDS: Thin films, Ellipsometry, Refractive index, Data modeling, Calibration, Infrared spectroscopy, Spectroscopic ellipsometry, Infrared radiation, Vacuum ultraviolet, Anisotropy

Proceedings Article | 10 December 2001 Paper
Proc. SPIE. 4449, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II
KEYWORDS: Oxides, Data modeling, Birefringence, Sensors, Calibration, In situ metrology, Silicon, Data acquisition, Semiconducting wafers, Bandpass filters

Proceedings Article | 10 December 2001 Paper
Proc. SPIE. 4449, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II
KEYWORDS: Light emitting diodes, Data modeling, Crystals, Infrared spectroscopy, Gallium nitride, Infrared radiation, Phonons, Gallium, Heterojunctions, Stereolithography

Proceedings Article | 2 November 2000 Paper
Proc. SPIE. 4099, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries
KEYWORDS: Thin films, Ellipsometry, Lithography, Refractive index, Data modeling, Crystals, Dielectrics, Spectroscopic ellipsometry, Silicon carbide, Vacuum ultraviolet

Showing 5 of 20 publications
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