Prof. John A. Woollam
President at JA Woollam
SPIE Involvement:
Author
Publications (20)

Proceedings Article | 23 July 2003
Proc. SPIE. 4965, Optical Diagnostics and Sensing in Biomedicine III
KEYWORDS: Ellipsometry, Infrared radiation, Chemical analysis, Visible radiation, Reflection, Silicon, Spectroscopic ellipsometry, Optical testing, Absorption, Molecules

Proceedings Article | 30 May 2003
Proc. SPIE. 4932, Laser-Induced Damage in Optical Materials: 2002 and 7th International Workshop on Laser Beam and Optics Characterization
KEYWORDS: Ellipsometry, Infrared radiation, Anisotropy, Spectroscopic ellipsometry, Thin films, Vacuum ultraviolet, Refractive index, Data modeling, Calibration, Infrared spectroscopy

Proceedings Article | 10 December 2001
Proc. SPIE. 4449, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II
KEYWORDS: Data modeling, Oxides, Silicon, Calibration, Data acquisition, Sensors, Bandpass filters, In situ metrology, Semiconducting wafers, Birefringence

Proceedings Article | 10 December 2001
Proc. SPIE. 4449, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II
KEYWORDS: Gallium nitride, Phonons, Light emitting diodes, Infrared spectroscopy, Stereolithography, Infrared radiation, Gallium, Heterojunctions, Data modeling, Crystals

Proceedings Article | 2 November 2000
Proc. SPIE. 4099, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries
KEYWORDS: Vacuum ultraviolet, Spectroscopic ellipsometry, Dielectrics, Silicon carbide, Refractive index, Ellipsometry, Thin films, Lithography, Data modeling, Crystals

Showing 5 of 20 publications
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