Jolly Xu
at ASML
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 20 March 2020 Paper
Simon Mathijssen, Herman Heijmerikx, Farzad Farhadzadeh, Marc Noot, Lineke van der Sneppen, Longfei Shen, Fei Jia, Jolly Xu, Huajun Qin, Arie den Boef, Elliott Mc Namara, Kaustuve Bhattacharyya, Chao Fang, Yaobin Feng
Proceedings Volume 11325, 113252L (2020) https://doi.org/10.1117/12.2551899
KEYWORDS: Diffraction, Overlay metrology, Metrology, Diffraction gratings, Semiconducting wafers, Polarization, Silicon, Detection and tracking algorithms

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