Dr. Jonathan L. Cobb
SPIE Involvement:
Publications (37)

Proceedings Article | 22 February 2021 Presentation + Paper
Shela Aboud, Joanne Huang, Jonathan Cobb, Tue Gunst, Plamen Asenov, Thuc Dam, Ricardo Borges
Proceedings Volume 11614, 116140S (2021) https://doi.org/10.1117/12.2583912
KEYWORDS: Metals, Standards development, Ruthenium, Performance modeling, Copper, Transistors, Scattering, Oscillators, Materials processing, Electronic design automation

Proceedings Article | 23 March 2020 Presentation + Paper
Proceedings Volume 11328, 113280C (2020) https://doi.org/10.1117/12.2554025
KEYWORDS: Fin field effect transistors, Standards development, Transistors, Clocks, Device simulation, TCAD, Logic, Design for manufacturability

Proceedings Article | 5 April 2011 Paper
Proceedings Volume 7969, 79690S (2011) https://doi.org/10.1117/12.880230
KEYWORDS: Optical proximity correction, Extreme ultraviolet, Photomasks, Reticles, Extreme ultraviolet lithography, 193nm lithography, Lithography, Manufacturing, Optical lithography, Model-based design

Proceedings Article | 23 March 2010 Paper
Proceedings Volume 7636, 763627 (2010) https://doi.org/10.1117/12.848290
KEYWORDS: Extreme ultraviolet, Optical proximity correction, Photomasks, Calibration, Optical lithography, Data modeling, Extreme ultraviolet lithography, Point spread functions, Reticles, 3D modeling

Proceedings Article | 17 October 2008 Paper
Proceedings Volume 7122, 71223Z (2008) https://doi.org/10.1117/12.801593
KEYWORDS: Optical proximity correction, Atrial fibrillation, Lithography, Lithographic illumination, Manufacturing, Resolution enhancement technologies, Optical lithography, Process modeling, Semiconductors, Semiconducting wafers

Showing 5 of 37 publications
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