Prof. Jonathan R. Felts
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 26 March 2019
Proc. SPIE. 10958, Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019
KEYWORDS: Silicon, Polymers, Etching, Nanolithography, Atomic force microscopy, Optical lithography, Semiconducting wafers, Nanofabrication, Scanning probe lithography, Atomic force microscopic nanolithography

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