Laser produced plasma (LPP) systems have been developed as the primary approach for use in EUV scanner light sources for optical imaging of circuit features at 20nm nodes and beyond. This paper provides a review of development progress and productization status for LPP extreme-ultra-violet (EUV) sources with performance goals targeted to meet specific requirements from ASML. We present the latest results on power generation and collector
protection for sources in the field operating at 10W nominal power and in San Diego operating in MOPA (Master Oscillator Power Amplifier) Prepulse mode at higher powers. Semiconductor industry standards for reliability and source availability data are provided. In these proceedings we show results demonstrating validation of MOPA Prepulse operation at high dose-controlled power: 40 W average power with closed-loop active dose control meeting the requirement for dose stability, 55 W average power with closed-loop active dose control, and early collector
protection tests to 4 billion pulses without loss of reflectivity.
Laser produced plasma (LPP) systems have been developed as the primary approach for the EUV scanner
light source for optical imaging of circuit features at sub-22nm and beyond nodes on the ITRS roadmap. This
paper provides a review of development progress and productization status for LPP extreme-ultra-violet
(EUV) sources with performance goals targeted to meet specific requirements from leading scanner
manufacturers. We present the latest results on exposure power generation, collection, and clean transmission
of EUV through the intermediate focus. Semiconductor industry standards for reliability and source
availability data are provided. We report on measurements taken using a 5sr normal incidence collector on a
production system. The lifetime of the collector mirror is a critical parameter in the development of extreme
ultra-violet LPP lithography sources. Deposition of target material as well as sputtering or implantation of
incident particles can reduce the reflectivity of the mirror coating during exposure. Debris mitigation
techniques are used to inhibit damage from occuring, the protection results of these techniques will be shown
over multi-100's of hours.
The mechanisms responsible for an increase in collimation of laboratory plasma jets with higher atomic number was studied using soft x-ray laser interferometry and 2D model simulations. Dense plasma jets (Ne~ 1020 cm-3) were produced by irradiating V-shaped grooves of different materials (C, Al, and Cu) with 120 ps Ti:Sa laser pulses at peak intensities of 1 x 1012 W cm-2. High contrast soft x-ray interferograms of these plasmas were generated by combining a Mach-Zehnder interferometer that uses diffraction gratings as beam-splitters and a 46.9 nm table-top capillary discharge laser probe. A significant increase in jet collimation was observed for the higher Z materials. Simulations performed
with the radiation hydrodynamic code HYDRA attribute differences in jet collimation to an increased radiation cooling of the higher Z jets.
Soft x-ray interferometry was used to measure the evolution of dense converging plasmas created by laser irradiation of 500 μm diameter semi-cylindrical carbon targets. Optical laser pulses with an intensity of ~1×1012W cm-2 and 120 ps duration were used to heat the surface of the cavities. The dense plasma formed expands from the walls converging slightly off the semi-cylinder's axis, giving rise to a bright localized high density plasma region. A sequence of electron density maps were measure using a 46.9 nm wavelength tabletop capillary discharge soft x-ray laser probe and an amplitude division interferometer based on diffraction gratings. The measured density profiles are compared with simulations conducted using the multi-diminensional hydrodynamic code HYDRA. The benchmarked model was then used to simulate particle trajectories which reveal that the increase in electron density near the axis is mainly the result of the convergence of plasma that originated at the bottom of the groove during laser irradiation.
We have used soft x-ray laser interferometry to study dense colliding plasmas produced by laser irradiation of semi-cylindrical targets. Results are reported on the evolution of 1 mm long plasmas created by heating 500 μm diameter half holhraum copper targets with an intensity of ~1.6 1012 W.cm-2 from 120 ps duration laser pulses of 800 nm wavelength. The setup combines a robust high throughput amplitude division interferometer based on diffraction gratings with a 46.9 nm table-top capillary discharge laser. Series of high contrast interferograms were obtained depicting the evolution of the copper plasmas into a localized plasma that reaches densities above 1×1020 cm-3 when the plasmas collide near the center of the cavity. The technique allows the generation of high resolution density maps of colliding plasma with various degree of collisionality for comparison with code simulations.
We report clear evidence of the existence of multiply ionized plasmas with index of refraction greater than one at soft x-ray wavelengths. Moreover, it is shown to be a general phenomenon affecting broad spectral regions in numerous highly ionized plasmas. The experimental evidence consists of the observation of anomalous fringe shifts in soft x-ray laser interferograms of laser-created Al plasmas probed at 14.7 nm and of Ag and Sn laser-created plasmas probed at 46.9 nm. The comparison of measured and simulated interferograms shows that these anomalous fringe shifts result from the dominant contribution of low charge ions to the index of refraction. This usually neglected bound electron contribution can affect the propagation of soft x-ray radiation in plasmas and the interferometric diagnostics of plasmas for many elements and at different wavelengths.