Jonathan Grava
at Colorado State Univ
SPIE Involvement:
Author
Publications (6)

PROCEEDINGS ARTICLE | April 1, 2013
Proc. SPIE. 8679, Extreme Ultraviolet (EUV) Lithography IV
KEYWORDS: Mirrors, Scanners, Carbon dioxide lasers, Laser scanners, Extreme ultraviolet, Extreme ultraviolet lithography, Pulsed laser operation, Plasma systems, Plasma, Tin

PROCEEDINGS ARTICLE | March 23, 2012
Proc. SPIE. 8322, Extreme Ultraviolet (EUV) Lithography III
KEYWORDS: Mirrors, Scanners, Coating, Manufacturing, Laser scanners, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, Plasma, Tin

PROCEEDINGS ARTICLE | September 29, 2009
Proc. SPIE. 7451, Soft X-Ray Lasers and Applications VIII
KEYWORDS: X-rays, Copper, Interferometry, Laser irradiation, Collimation, Aluminum, Picosecond phenomena, X-ray lasers, Pulsed laser operation, Plasma

PROCEEDINGS ARTICLE | October 15, 2007
Proc. SPIE. 6702, Soft X-Ray Lasers and Applications VII
KEYWORDS: Carbon, Capillaries, Particles, Interferometry, Laser irradiation, Ionization, Picosecond phenomena, X-ray lasers, Laser beam diagnostics, Plasma

PROCEEDINGS ARTICLE | September 14, 2005
Proc. SPIE. 5919, Soft X-Ray Lasers and Applications VI
KEYWORDS: Mirrors, Beam splitters, Interferometers, Capillaries, Copper, Plasmas, Interferometry, X-ray lasers, Laser beam diagnostics, Diffraction gratings

PROCEEDINGS ARTICLE | September 14, 2005
Proc. SPIE. 5919, Soft X-Ray Lasers and Applications VI
KEYWORDS: X-rays, Copper, Ions, Silver, Plasmas, Interferometry, Refraction, Aluminum, X-ray lasers, Tin

Showing 5 of 6 publications
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