Scandium oxide is an attractive candidate for the engineering of interference coatings, although not widely explored.
This paper describes the ion beam sputtering of Sc<sub>2</sub>O<sub>3</sub>. It is shown that the structural properties of the material are
affected by the deposition conditions. Laser damage in different regimes of pulsewidths is investigated. These results
show that the 1-on-1 laser damage fluence, in both the thermal and deterministic regimes, varies with deposition
conditions but this is not the case for S-on-1, indicating that laser-induced defects are important.