Jong Hoon Kim
at SK Hynix Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 21 May 2011
Proc. SPIE. 8012, Infrared Technology and Applications XXXVII
KEYWORDS: Amorphous silicon, Microbolometers, Oxides, Sputter deposition, Metals, Nickel, Resistance, Heat treatments, Oxygen, Oxidation

Proceedings Article | 13 March 2006
Proc. SPIE. 6156, Design and Process Integration for Microelectronic Manufacturing IV
KEYWORDS: Semiconductors, Oxides, Lithography, Reticles, Optical lithography, Etching, Photomasks, Critical dimension metrology, Resolution enhancement technologies, Chemical mechanical planarization

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