Dr. Jong-Keun Park
at DuPont Electronics & Imaging
SPIE Involvement:
Author
Publications (10)

Proceedings Article | 24 February 2020 Presentation + Paper
Proc. SPIE. 11301, Novel In-Plane Semiconductor Lasers XIX
KEYWORDS: Oxides, Waveguides, Sensors, Etching, Gallium arsenide, Silicon, Reliability, Resistance, Semiconductor lasers, Aluminum

Proceedings Article | 25 March 2019 Paper
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Lithography, Electronics, Optical lithography, Polymers, Chemistry, Scanning electron microscopy, Extreme ultraviolet lithography, Semiconducting wafers

Proceedings Article | 4 March 2019 Presentation + Paper
Proc. SPIE. 10900, High-Power Diode Laser Technology XVII
KEYWORDS: Waveguides, Sensors, High power lasers, Silicon, Reliability, Resistance, Doping, Semiconductor lasers, Diodes, Near field optics

Proceedings Article | 13 March 2018 Paper
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Lithography, Optical lithography, Coating, Photoresist materials, Line width roughness, Extreme ultraviolet lithography, Critical dimension metrology, Photoresist processing, Photoresist technology, Photoresist developing, Defect inspection

Proceedings Article | 25 May 2017 Presentation
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Lithium, Optical lithography, Etching, Coating, Manufacturing, Photomasks, Integrated circuits, Double patterning technology, Immersion lithography, Deposition processes

Showing 5 of 10 publications
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