Jong-Min Kim
Director at Photronics Inc
SPIE Involvement:
Author
Publications (13)

Proceedings Article | 16 September 2013
Proc. SPIE. 8880, Photomask Technology 2013
KEYWORDS: Microscopes, Contamination, Reflection, Ions, Silicon, Inspection, Reflectivity, Chromium, Ion beams, Mask making

Proceedings Article | 30 June 2012
Proc. SPIE. 8441, Photomask and Next-Generation Lithography Mask Technology XIX
KEYWORDS: Photovoltaics, Solar energy, Scanners, Diffusion, Chromium, Scanning electron microscopy, Photomasks, Critical dimension metrology, Semiconducting wafers

Proceedings Article | 14 October 2011
Proc. SPIE. 8166, Photomask Technology 2011
KEYWORDS: Etching, Dry etching, Ions, Coating, Inspection, Chromium, Photomasks, Aluminum, Fluorine, Phase shifts

Proceedings Article | 25 September 2010
Proc. SPIE. 7823, Photomask Technology 2010
KEYWORDS: Scattering, Air contamination, Particles, Inspection, Scanning electron microscopy, Photomasks, SRAF, Critical dimension metrology, Acoustics, Mask cleaning

Proceedings Article | 24 March 2009
Proc. SPIE. 7272, Metrology, Inspection, and Process Control for Microlithography XXIII
KEYWORDS: Air contamination, Molecules, Ions, Chromium, Pellicles, Adsorption, Surface properties, Photomasks, Semiconducting wafers, Thermodynamics

Showing 5 of 13 publications
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