Dr. Jong-Moon Park Profile

Dr. Jong-Moon Park

at ETRI

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 26 March 2013 Paper

Jong-Moon Park, Kun-Sik Park, Dong-Pyo Kim, Seong-Ook Yoo, Jin-Ho Lee

Proceedings Volume 8680, 86802B (2013) https://doi.org/10.1117/12.2011400

KEYWORDS: Silicon, Etching, Oxides, Silica, Nanoimprint lithography, Oxygen, Optical lithography, Scanning electron microscopy, Plasma, Wet etching

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Keywords/Phrases