Dr. Jong-Yong Kim
at Dongjin Semichem Co Ltd
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | May 4, 2005
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Refractive index, Optical lithography, Polymers, Water, Diffusion, Photoresist materials, Immersion lithography, Photoresist processing, Polymer thin films, Liquids

PROCEEDINGS ARTICLE | June 12, 2003
Proc. SPIE. 5039, Advances in Resist Technology and Processing XX
KEYWORDS: Lithography, Polymers, Water, Silicon, Photoresist materials, Photoresist processing, Semiconducting wafers, Polymer thin films, Photorefractive polymers, 193nm lithography

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