Jongwon Jang
at SK Hynix Inc
SPIE Involvement:
Publications (4)

Proceedings Article | 31 March 2014 Paper
Proceedings Volume 9052, 90521W (2014)
KEYWORDS: SRAF, Model-based design, Metals, Instrument modeling, Lithography, Logic devices, Optical proximity correction, Shape memory alloys, Logic, Semiconducting wafers

Proceedings Article | 12 April 2013 Paper
Jongwon Jang, Hyungjeong Jeong, Hyungsoon Yune, Seyoung Oh, Hyunjo Yang, Donggyu Yim
Proceedings Volume 8683, 86831V (2013)
KEYWORDS: SRAF, Photomasks, Optical proximity correction, Metals, Modulation, Scanning electron microscopy, Scanners, Cadmium sulfide, Semiconducting wafers, Double patterning technology

Proceedings Article | 23 March 2011 Paper
Jongwon Jang, Daejin Park, Jeaseung Choi, Areum Jung, Gyun Yoo, Jungchan Kim, Cheol-kyun Kim, Donggyu Yim, Junwei Lu, Seunghoon Park, Zongchang Yu, Venu Vellanki, Wenkin Shao, Chris Park
Proceedings Volume 7973, 79730S (2011)
KEYWORDS: Scanners, Critical dimension metrology, Semiconducting wafers, Cadmium, Calibration, Data modeling, Computer simulations, Metrology, Control systems, Lithography

Proceedings Article | 10 March 2010 Paper
Proceedings Volume 7640, 764013 (2010)
KEYWORDS: Scanners, Critical dimension metrology, Optical proximity correction, Instrument modeling, Lithographic illumination, Shape analysis, Process modeling, Semiconducting wafers, Resolution enhancement technologies, Lithography

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