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Dr. Joon-Shik Park
Principal Researcher at Korea Electronics Technology Institute
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Publications (1)
Proceedings Article | 24 January 2004 Paper
Electrostatic micromirror fabricated using CMP and anodic bonding
Kunnyun Kim, Wonseok Choi, Kwangbum Park, Joon-Shik Park, Hyo-Derk Park, Hoon Heo
Proceedings Volume 5346, (2004) https://doi.org/10.1117/12.524676
KEYWORDS: Micromirrors, Mirrors, Semiconducting wafers, Electrodes, Silicon, Chemical mechanical planarization, Glasses, Wafer bonding, Microactuators, Electroplating
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