Dr. JoonYeon Cho
Manager at EMD Performance Materials Corp
SPIE Involvement:
Author
Publications (13)

Proceedings Article | 7 April 2017
Proc. SPIE. 10149, Advanced Etch Technology for Nanopatterning VI
KEYWORDS: Oxides, Optical lithography, Contamination, Etching, Metals, Silicon, Reflectivity, Photomasks, System on a chip, Plasma

Proceedings Article | 25 March 2016
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Silicon, Resistance, Oxygen, Semiconducting wafers

Proceedings Article | 20 March 2015
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Oxides, Etching, Metals, Dielectrics, Silicon, Coating, Resistance, Photomasks, Plasma etching, Semiconducting wafers

Proceedings Article | 27 March 2014
Proc. SPIE. 9051, Advances in Patterning Materials and Processes XXXI
KEYWORDS: Oxides, Etching, Metals, Silicon, Resistance, Chemical vapor deposition, Atomic layer deposition, Wet etching, Semiconductor manufacturing, Semiconducting wafers

Proceedings Article | 27 March 2014
Proc. SPIE. 9051, Advances in Patterning Materials and Processes XXXI
KEYWORDS: Lithography, Optical lithography, Polymers, Photons, Electrons, Printing, Photomasks, Extreme ultraviolet, Absorbance, Extreme ultraviolet lithography

Showing 5 of 13 publications
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