Prof. Jordan M. Berg Profile

Prof. Jordan M. Berg

Assistant Professor at Texas Tech Univ

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Publications (2)

Proceedings Article | 17 May 2005 Paper

Integrated charge and position sensing for feedback control of electrostatic MEMS

Robert Anderson, Balasaheb Kawade, Kandiah Ragulan, D. H. S. Maithripala, Jordan Berg, Richard Gale, W. Dayawansa

Proceedings Volume 5765, (2005) https://doi.org/10.1117/12.600634

KEYWORDS: Electrodes, Sensors, Microelectromechanical systems, Capacitance, Capacitors, Feedback control, Nonlinear control, Device simulation, Oxides, Amplifiers

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Proceedings Article | 25 August 1997 Paper

Real-time control of etching processes: experimental results

Jordan Berg, Ted Higman, Allen Tannenbaum

Proceedings Volume 3213, (1997) https://doi.org/10.1117/12.284645

KEYWORDS: Etching, Process control, Chemical species, Plasma, Silicon, Interfaces, Argon, Emission spectroscopy, Control systems, Thin films

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