Jordi Llobet
at Institute of Microelectronics of Barcelona IMB-CNM
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | July 27, 2015
JM3 Vol. 14 Issue 03
KEYWORDS: Silicon, Scanning electron microscopy, Wet etching, Ion beams, Ion implantation, Resonators, Etching, Nanolithography, Ions, Nanowires

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Resonators, Etching, Silicon, Scanning electron microscopy, Ion beams, Photomasks, Ion implantation, Wet etching, Nanolithography, Nanowires

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