Dr. Jorge Albero
at FEMTO-ST
SPIE Involvement:
Author
Publications (17)

Proceedings Article | 27 April 2016
Proc. SPIE. 9888, Micro-Optics 2016
KEYWORDS: Optical components, Polishing, Glasses, Micro optics, Microlens, Optical aberrations, Semiconducting wafers

Proceedings Article | 26 April 2016
Proc. SPIE. 9890, Optical Micro- and Nanometrology VI
KEYWORDS: Microelectromechanical systems, Gold, Beam splitters, Mirau interferometers, Interferometers, Optical coherence tomography, Glasses, Scanners, Microopto electromechanical systems, Microlens, Laser cutting, Semiconducting wafers, Wafer bonding

Proceedings Article | 26 April 2016
Proc. SPIE. 9890, Optical Micro- and Nanometrology VI
KEYWORDS: Mirrors, Beam splitters, Microsystems, Optical coherence tomography, Skin, Silicon, Microopto electromechanical systems, Semiconducting wafers

Proceedings Article | 26 April 2016
Proc. SPIE. 9890, Optical Micro- and Nanometrology VI
KEYWORDS: Phase shifting, Mirau interferometers, Optical coherence tomography, Etching, Silicon, Interferometry, Microactuators, Microopto electromechanical systems, Micromirrors, Photomasks, Semiconducting wafers, Phase shifts

Proceedings Article | 18 August 2014
Proc. SPIE. 9204, Interferometry XVII: Advanced Applications
KEYWORDS: Optical components, Microscopes, Imaging systems, Etching, Wavefronts, 3D metrology, Objectives, Microlens, Modulation transfer functions, Molybdenum

Showing 5 of 17 publications
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