Jorge Amírola-Sanz
at Univ Politecnica de Catalunya
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | July 1, 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Gas sensors, Resonators, Sensors, Electrodes, Polymers, Glasses, Silicon, Capacitance, Adsorption, Semiconducting wafers

PROCEEDINGS ARTICLE | April 24, 2003
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Gas sensors, Sensors, Etching, Glasses, Interfaces, Silicon, Adsorption, Integrated optics, Semiconducting wafers, Electrochemical etching

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