Jorge Amírola-Sanz
at Univ Politecnica de Catalunya
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 1 July 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Sensors, Resonators, Silicon, Polymers, Gas sensors, Capacitance, Adsorption, Glasses, Semiconducting wafers, Electrodes

Proceedings Article | 24 April 2003
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Silicon, Semiconducting wafers, Glasses, Etching, Gas sensors, Sensors, Adsorption, Interfaces, Integrated optics, Electrochemical etching

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