Dr. Jorge P. Fernandez
Sr. Director of Marketing
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 10 May 2005
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: Wafer-level optics, Semiconductors, Capacitors, Defect detection, Scattering, Inspection, Interference (communication), Monte Carlo methods, Wafer inspection, Semiconducting wafers

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